Semiconductor Industry
ERD repairs a number of electronic and motor controls used in a variety of semiconductor processes including CMP, Lithography, and Ion implant. With our capability of working on ultra-high voltage power systems and our proven track record of repairing single custom electronics we are the best choice for full semiconductor fab support.
The Semiconductor industry is a manufacturing industry that is a collection of processes based on the final product being produced. The largest area of manufacturing is in the silicon product which is what is used to make most modern electronic devices.
These processes use what is referred to as “tools” to move through the various processes to the final product.
At ERD, we have been involved with “tools” at every major point of the process of silicon-based semiconductor products, from the growth of the silicon cone to the polishing of the new wafer through all the etching and lithography.
ERD repairs a number of electronic and motor controls used in a variety of semiconductor processes including CMP, Lithography, and Ion implant. With our capability of working on ultra-high voltage power systems and our proven track record of repairing single custom electronics we are the best choice for full semiconductor fab support.
The Semiconductor industry is a manufacturing industry that is a collection of processes based on the final product being produced. The largest area of manufacturing is in the silicon product which is what is used to make most modern electronic devices.
These processes use what is referred to as “tools” to move through the various processes to the final product.
At ERD, we have been involved with “tools” at every major point of the process of silicon-based semiconductor products, from the growth of the silicon cone to the polishing of the new wafer through all the etching and lithography.
Robots: The Movement of the Wafer Through the Process
Semiconductor tooling is very complex and generally involves a number of wafer handling robots which move the wafers from one tool to another. ERD has repaired a variety of parts used in these robots as well as performing a rebuild on an entire robot system.
The Genmark Robot is used in a number of applications for moving product from one tool to another. This specific system was used in a MOCVD system which is a very caustic process developed to limit direct human interaction.
The XP Robot for the AMAT 300mm Reflexion CMP System is used in traditional silicon wafer semiconductor manufacturing. This 2 axis motor controls runs the part of the robot that moves the cartridge through the system as the silicon wafers are being processed.
The Noah Peltier Junction Chiller is a system that electronically cools a process to a very tight tolerance. This process media can be water but also other chemicals used in the various tools which may need precise temperatures for processing the product.
The Glassman HV Power Supply is used in Ion implant and other parts of the process which require a high DC voltage for injecting ions into a substrate. These power supplies range in voltages from 5000volts to as high as 250,000 volts. ERD has been able to both repair and fully test these products over the years.
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